WS x /a-C multilayer films with different layer thickness ratios and the modulation period of ~50nm were prepared on monocrystalline silicon substrate by magnetron sputtering method. The morphology, microstructure and composition of the films were characterized by using scanning electron microscopy (SEM), X-ray diffractometry (XRD), energy dispersive X-ray spectroscopy (EDS) and Raman spectroscopy. The surface chemical states under different etching conditions were investigated by X-ray photoelectron spectroscopy (XPS) depth profile technique. The hardness, the adhesion to the substrate and the tribological properties of the films under various test environments were evaluated by means of nano-indentation, scratching tester and ball-on-disk tribometer. The results showed that a WS2 phase with (101) preferential orientation was formed in WS x sublayer and the WC phase was not present at the WS x /a-C interface. The effects of La-C/LWSx ratio on the microstructure of as-prepared films were negligible while the effects on the mechanical and tribological properties of the film were significant. An increased hardness (the maximum of ~2.2GPa) and a decreased adhesion were found in the multilayer films. The WS x /a-C multilayer films were of the best wear resistance in vacuum (the minimum of 5.7×10⁻¹⁵ m³ N⁻¹ m⁻¹) and exhibited much better tribological properties than a single WS x film in various test environments.

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hardness ballondisk tribometer wear resistance surface chemical states xray photoelectron spectroscopy adhesion raman linf locpostacinflinf locpostwsitalicxitalic inf ratio wsinf locpost2inf phase maximum of hsp sp01022hsp sp025gpa morphology microstructure tribological composition depth profile nanoindentation scratching tester modulation period sp025hsp sp02510sup locposthsp sp01015sup hsp sp025msup locpost3sup hsp sp025nsup locposthsp sp0101sup hsp sp025msup locposthsp scanning electron microscopy layer thickness mechanical magnetron sputtering locpost italicxitalic infac multilayer diffractometry

Fang-er Yang, Xiang-hua Zhang, Rong Zhang, Ye Lu, Xiao-hua Zheng,.Microstructure and tribological properties of WSx/a-C multilayer films with various layer thickness ratios in different environments. 309 (0),187-194.

Fang-er Yang, et al."Microstructure and tribological properties of WSx/a-C multilayer films with various layer thickness ratios in different environments" 309

Fang-er Yang, Xiang-hua Zhang, Rong Zhang, Ye Lu, Xiao-hua Zheng,"Microstructure and tribological properties of WSx/a-C multilayer films with various layer thickness ratios in different environments"